Inventor · disambiguated record
David J. Drage
Also filed as: DRAGE DAVID J
7 granted patents·1,678 citations·filing 1978–1990
91Inventor score
Top patents by PatentIndex Score
7 records- 0197US4590042APlasma reactor having slotted manifoldTEGAL CORP·Filed 1984·Granted May 20, 1986·346 cites·13 claims
- 0296US4780169ANon-uniform gas inlet for dry etching apparatusTEGAL CORP·Filed 1987·Granted Oct 25, 1988·625 cites·7 claims
- 0395US4790258AMagnetically coupled wafer lift pinsTEGAL CORP·Filed 1987·Granted Dec 13, 1988·420 cites·5 claims
- 0489US4793975APlasma Reactor with removable insertTEGAL CORP·Filed 1987·Granted Dec 27, 1988·95 cites·7 claims
- 0589US4207466AInfrared proximity detecting apparatusDRAGE DAVID J·Filed 1978·Granted Jun 10, 1980·78 cites·11 claims
- 0680US4971653ATemperature controlled chuck for elevated temperature etch processingMATRIX INTEGRATED SYSTEMS·Filed 1990·Granted Nov 20, 1990·88 cites·10 claims
- 0761US4697089ADual wavelength sensor which employs object as part of a corner reflectorTEGAL CORP·Filed 1986·Granted Sep 29, 1987·26 cites·9 claims
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