Inventor
CHAU CHENG-PO
TW22 patents
Patents
22 patentsUS10157770B2Dec 18, 2018
Semiconductor device having isolation structures with different thickness and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10504735B2Dec 10, 2019
Method of forming a semiconductor device by high-pressure anneal and post-anneal treatment
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11776814B2Oct 3, 2023
Method of forming semiconductor device by driving hydrogen into a dielectric layer from another dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10950447B2Mar 16, 2021
Semiconductor device having hydrogen in a dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10714348B2Jul 14, 2020
Semiconductor device having hydrogen in a dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11901442B2Feb 13, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12183581B2Dec 31, 2024
Method of forming a semiconductor device by driving hydrogen into a dielectric layer from another dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923235B2Mar 5, 2024
Method for forming semiconductor device having isolation structures with different thicknesses
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11450555B2Sep 20, 2022
Method for forming semiconductor device having isolation structures with different thicknesses
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11211470B2Dec 28, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10950490B2Mar 16, 2021
Semiconductor device having isolation structures with different thicknesses
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12283622B2Apr 22, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11728406B2Aug 15, 2023
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11677015B2Jun 13, 2023
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11087987B2Aug 10, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12308369B2May 20, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12183573B2Dec 31, 2024
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11854800B2Dec 26, 2023
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11037781B2Jun 15, 2021
Device and method for high pressure anneal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11444173B2Sep 13, 2022
Semiconductor device structure with salicide layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10868137B2Dec 15, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10879371B2Dec 29, 2020
Thermal treatment for gate dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47