Inventor

SHMAENOK LEONID

NL4 patents

⚠️ This page may combine multiple inventors who share the name “SHMAENOK LEONID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7372623B2May 13, 2008

Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV19 citations89

US7639418B2Dec 29, 2009

Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV13 citations80

STICHTING TECH WETENSCHAPP

1 patent

US6359969B1Mar 19, 2002

Filter for extreme ultraviolet lithography

STICHTING TECH WETENSCHAPP186 citations95

SHMAENOK LEONID

1 patent

USRE44120EApr 2, 2013

Filter for extreme ultraviolet lithography

SHMAENOK LEONID0 citations42