Inventor
SPEER ULRICH
DE7 patents
Patents
7 patentsUS6170169B1Jan 9, 2001
Device for drying substrates
STEAG HAMATECH AG11 citations72
US6494511B1Dec 17, 2002
Apparatus and method for handling substrates
STEAG HAMATECH AG2 citations61
US7008502B2Mar 7, 2006
Method and apparatus for joining substrates
STEAG HAMATECH AG2 citations58
US6612558B1Sep 2, 2003
Apparatus for fixing substrates
STEAG HAMATECH AG2 citations58
US6953514B2Oct 11, 2005
Method and device for assembling substrates
STEAG HAMATECH AG4 citations55
US7182116B2Feb 27, 2007
Device for joining substrates
STEAG HAMATECH AG0 citations46
US6814125B1Nov 9, 2004
Apparatus for joining substrates together
STEAG HAMATECH AG1 citations39