Inventor · disambiguated record
Thomas Windhorn
Also filed as: WINDHORN THOMAS · WINDHORN THOMAS H
8 granted patents·1 pending application·288 citations·filing 2001–2004
89Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
9 records- 0196US7005842B2Probe cartridge assembly and multi-probe assemblyTOKYO ELECTRON LTD·Filed 2001·Granted Feb 28, 2006·126 cites·19 claims
- 0292US6657395B2Close coupled match structure for RF drive electrodeTOKYO ELECTRON LTD·Filed 2003·Granted Dec 2, 2003·51 cites·15 claims
- 0387US6812646B2Method and device for attenuating harmonics in semiconductor plasma processing systemsTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·26 cites·22 claims
- 0479US7019253B2Electrically controlled plasma uniformity in a high density plasma sourceTOKYO ELECTRON LTD·Filed 2002·Granted Mar 28, 2006·37 cites·20 claims
- 0576US6700458B2Device and method for coupling two circuit components which have different impedancesTOKYO ELECTRON LTD·Filed 2002·Granted Mar 2, 2004·16 cites·27 claims
- 0672US7227624B2Method and apparatus for monitoring the condition of plasma equipmentTOKYO ELECTRON LTD·Filed 2002·Granted Jun 5, 2007·9 cites·34 claims
- 0770US6806650B2Structure and the method for measuring the spectral content of an electric field as a function of position inside a plasmaTOKYO ELECTRON LTD·Filed 2002·Granted Oct 19, 2004·15 cites·21 claims
- 0854US7212078B2Method and assembly for providing impedance matching network and network assemblyTOKYO ELECTRON LTD·Filed 2004·Granted May 1, 2007·8 cites·71 claims
- 0938US2003094239A1Apparatus and method for improving electron eccelerationFiled 2002·Application pending·0 cites
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