Inventor
ASAI KAZUHIDE
JP25 patents
⚠️ This page may combine multiple inventors who share the name “ASAI KAZUHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
10 patentsUS11387152B1Jul 12, 2022
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP2 citations71
US11236743B2Feb 1, 2022
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP3 citations71
US10937676B2Mar 2, 2021
Substrate processing apparatus and device management controller
KOKUSAI ELECTRIC CORP4 citations71
US11996337B2May 28, 2024
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US12341000B2Jun 24, 2025
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US12417049B2Sep 16, 2025
Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing system
KOKUSAI ELECTRIC CORP0 citations51
US11966210B2Apr 23, 2024
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11782425B2Oct 10, 2023
Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11237538B2Feb 1, 2022
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US10903098B2Jan 26, 2021
Substrate processing system and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations43
HITACHI INT ELECTRIC INC
8 patentsUS10211110B1Feb 19, 2019
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC13 citations83
US10496078B2Dec 3, 2019
Substrate processing system, substrate processing apparatus and management device
HITACHI INT ELECTRIC INC2 citations73
US10860005B2Dec 8, 2020
Substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations71
US10289781B2May 14, 2019
Management apparatus, substrate processing system and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations69
US9400794B2Jul 26, 2016
Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations62
US7813828B2Oct 12, 2010
Substrate processing system and group management system
HITACHI INT ELECTRIC INC3 citations62
US11086304B2Aug 10, 2021
Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis
HITACHI INT ELECTRIC INC0 citations50
US8719230B2May 6, 2014
Information managing method, information searching method and data displaying method
HITACHI INT ELECTRIC INC0 citations50
ASAI KAZUHIDE
7 patentsUS9581996B2Feb 28, 2017
Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process
ASAI KAZUHIDE5 citations71
US8329479B2Dec 11, 2012
Information managing method, information managing apparatus and substrate processing system
ASAI KAZUHIDE2 citations60
US8538571B2Sep 17, 2013
Substrate processing system, group managing apparatus, and method of analyzing abnormal state
ASAI KAZUHIDE1 citations51
US8948899B2Feb 3, 2015
Substrate processing system, substrate processing apparatus and display method of substrate processing apparatus
ASAI KAZUHIDE0 citations50
US8447424B2May 21, 2013
Substrate processing system and group management system
ASAI KAZUHIDE1 citations50
US9142436B2Sep 22, 2015
Statistical analysis method and substrate process system
ASAI KAZUHIDE0 citations40
US8639367B2Jan 28, 2014
Substrate processing system
ASAI KAZUHIDE0 citations40