Inventor · disambiguated record
Jeff S. Cheung
Also filed as: CHEUNG JEFF S
2 granted patents·138 citations·filing 2000–2002
70Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0192US6890403B2Apparatus and process for controlling the temperature of a substrate in a plasma reactorAPPLIED MATERIALS INC·Filed 2002·Granted May 10, 2005·82 cites·18 claims
- 0289US6461980B1Apparatus and process for controlling the temperature of a substrate in a plasma reactor chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 8, 2002·56 cites·19 claims
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