P

Inventor

KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA

NL12 patents
⚠️ This page may combine multiple inventors who share the name “KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents
US9823589B2Nov 21, 2017

Lithographic apparatus and method

ASML NETHERLANDS BV5 citations83
USRE48668EAug 3, 2021

Temperature sensing probe, burl plate, lithographic apparatus and method

ASML NETHERLANDS BV0 citations62
USRE49297ENov 15, 2022

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations59
US10203611B2Feb 12, 2019

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations51
US10591828B2Mar 17, 2020

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations49
US10191377B2Jan 29, 2019

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations49

LAURENT THIBAULT SIMON MATHIEU

2 patents
US9298107B2Mar 29, 2016

Lithographic apparatus and method

LAURENT THIBAULT SIMON MATHIEU6 citations80
US9141005B2Sep 22, 2015

Temperature sensing probe, burl plate, lithographic apparatus and method

LAURENT THIBAULT SIMON MATHIEU0 citations48

WIJCKMANS MAURICE

1 patent
US8913228B2Dec 16, 2014

Lithographic apparatus and device manufacturing method

WIJCKMANS MAURICE2 citations54

JACOBS JOHANNES HENRICUS WILHELMUS

1 patent
US8462313B2Jun 11, 2013

Lithographic apparatus and device manufacturing method

JACOBS JOHANNES HENRICUS WILHELMUS0 citations50

PATEL HRISHIKESH

1 patent
US9618858B2Apr 11, 2017

Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table

PATEL HRISHIKESH0 citations48

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent
US8941815B2Jan 27, 2015

Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method

LAFARRE RAYMOND WILHELMUS LOUIS0 citations36