Inventor · disambiguated record
Tomoyo Yamaguchi
Also filed as: YAMAGUCHI TOMOYO
4 granted patents·1 pending application·23 citations·filing 2002–2007
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0168US7473377B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2004·Granted Jan 6, 2009·14 cites·66 claims
- 0252US7432207B2Method for etching object to be processedTOKYO ELECTRON LTD·Filed 2002·Granted Oct 7, 2008·4 cites·5 claims
- 0351US7115519B2Method for plasma treatmentTOKYO ELECTRON LTD·Filed 2003·Granted Oct 3, 2006·5 cites·13 claims
- 0449US7507673B2Method for etching an object to be processedTOKYO ELECTRON LTD·Filed 2007·Granted Mar 24, 2009·0 cites·4 claims
- 0537US2005101140A1Method of plasma etchingTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →