Inventor · disambiguated record
Michel Franciscus Johannes Van Rooy
Also filed as: VAN ROOY MICHEL FRANCISCUS JOH · VAN ROOY MICHEL FRANCISCUS JOHANNES
2 granted patents·1 pending application·2 citations·filing 2006–2010
35Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0165US7307687B2Lithographic apparatus, device manufacturing method and substrateASML NETHERLANDS BV·Filed 2006·Granted Dec 11, 2007·2 cites·14 claims
- 0237US8129097B2Immersion lithographyDE VRIES DIRK·Filed 2008·Granted Mar 6, 2012·0 cites·18 claims
- 0333US2010328636A1Producing a Marker Pattern and Measurement of an Exposure-Related Property of an Exposure ApparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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