Inventor
TOMASCHKO JOCHEN
DE10 patents
Patents
10 patentsUS12481150B2Nov 25, 2025
Micromechanical device
BOSCH GMBH ROBERT0 citations60
US12448280B2Oct 21, 2025
Bond structures on MEMS element and ASIC element
BOSCH GMBH ROBERT0 citations60
US11870369B2Jan 9, 2024
Microelectronics device and method for producing a microelectronics device
BOSCH GMBH ROBERT0 citations59
US12414470B2Sep 9, 2025
Semiconductor component including a dielectric layer
BOSCH GMBH ROBERT0 citations58
US12396366B2Aug 19, 2025
Semiconductor component including a dielectric layer
BOSCH GMBH ROBERT0 citations58
US12030773B2Jul 9, 2024
Method for producing a wafer connection
BOSCH GMBH ROBERT0 citations49
US10840107B2Nov 17, 2020
Method for forming a cavity and a component having a cavity
BOSCH GMBH ROBERT0 citations48
US10431474B2Oct 1, 2019
Method for forming a cavity and a component having a cavity
BOSCH GMBH ROBERT0 citations48
US9663351B2May 30, 2017
Method for producing a wafer equipped with transparent plates
BOSCH GMBH ROBERT1 citations48
US9461234B2Oct 4, 2016
Manufacturing method for a piezoelectric layer arrangement and corresponding piezoelectric layer arrangement
BOSCH GMBH ROBERT0 citations46