Inventor
KULKARNI MAYUR G
US14 patents
⚠️ This page may combine multiple inventors who share the name “KULKARNI MAYUR G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS10490436B2Nov 26, 2019
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films
APPLIED MATERIALS INC10 citations83
US9538583B2Jan 3, 2017
Substrate support with switchable multizone heater
APPLIED MATERIALS INC9 citations83
US10312076B2Jun 4, 2019
Application of bottom purge to increase clean efficiency
APPLIED MATERIALS INC5 citations72
US9706605B2Jul 11, 2017
Substrate support with feedthrough structure
APPLIED MATERIALS INC2 citations72
US10612135B2Apr 7, 2020
Method and system for high temperature clean
APPLIED MATERIALS INC2 citations71
US10600624B2Mar 24, 2020
System and method for substrate processing chambers
APPLIED MATERIALS INC5 citations70
US11512391B2Nov 29, 2022
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations62
US11508611B2Nov 22, 2022
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films
APPLIED MATERIALS INC1 citations62
US10199388B2Feb 5, 2019
VNAND tensile thick TEOS oxide
APPLIED MATERIALS INC1 citations58
US10113231B2Oct 30, 2018
Process kit including flow isolator ring
APPLIED MATERIALS INC1 citations52
US10724138B2Jul 28, 2020
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations51
US10017855B2Jul 10, 2018
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations51
US10483282B2Nov 19, 2019
VNAND tensile thick TEOS oxide
APPLIED MATERIALS INC0 citations47