Inventor · disambiguated record
Go Ayabe
Also filed as: AYABE GO
5 granted patents·5 citations·filing 2016–2020
65Inventor score
Top patents by PatentIndex Score
5 records- 0179US10046372B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Aug 14, 2018·4 cites·10 claims
- 0275US11538700B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 27, 2022·1 cites·7 claims
- 0347US10668494B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 2, 2020·0 cites·10 claims
- 0433US11282719B2Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange conditionTOKYO ELECTRON LTD·Filed 2019·Granted Mar 22, 2022·0 cites·10 claims
- 0526US10043692B2Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport programTOKYO ELECTRONICS LTD·Filed 2016·Granted Aug 7, 2018·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →