Inventor

SINGHAL AKHIL

US24 patents

⚠️ This page may combine multiple inventors who share the name “SINGHAL AKHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SINGHAL AKHIL

LAM RES CORP

Apparatus and method for deposition and etch in gap fill

Apparatus and method for deposition and etch in gap fill

Methods of encapsulation

Methods of encapsulation

Method for the reduction of defectivity in vapor deposited films

Metal-containing passivation for high aspect ratio etch

Apparatus and method for deposition and etch in gap fill

Method to clean SnO2 film from chamber

Methods of encapsulation

Deposition tool and method for depositing metal oxide films on organic materials

Method to clean SnO2 film from chamber

Modification of SNO2 surface for EUV lithography

Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation

Core removal

In situ protective coating of chamber components for semiconductor processing

Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems

APPLIED MATERIALS INC

Systems and methods of seasoning electrostatic chucks with dielectric seasoning films

Helium-free silicon formation

Profile shaping for control gate recesses

Profile shaping for control gate recesses

Systems and methods of seasoning electrostatic chucks with dielectric seasoning films

NOVELLUS SYSTEMS INC

PMOS transistor with compressive dielectric capping layer

Method for making high stress boron-doped carbon films

PMOS transistor with compressive dielectric capping layer