Inventor

CHEN TONG-YU

TW41 patents

⚠️ This page may combine multiple inventors who share the name “CHEN TONG-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN TONG-YU

UNITED MICROELECTRONICS CORP

Process for low k organic dielectric film etch

Method of patterning a dual damascene

Etching method

Method for forming three dimensional semiconductor structure and three dimensional capacitor

Method of cleaning the polymer from within holes on a semiconductor wafer

Method for forming a contact opening with multilevel etching

Method of removing photoresist and reducing native oxide in dual damascene copper process

Semiconductor structure and method of forming a harmonic-effect-suppression structure

Method of forming dual damascene structure

Method for removing photoresist layer

Method for forming a contact hole on a semiconductor wafer

Field effect transistor and manufacturing method thereof

Method for forming openings in low dielectric constant material layer

Method for forming a borderless contact hole

Seasoning process for etcher

Interconnect structure, interconnect layout structure, and manufacturing method thereof

Interconnect structure

Method of removing a photo-resist layer on a semiconductor wafer

Method of defining polysilicon patterns

Method of forming borderless contact

Method for high-density plasma etching

Method for forming a high aspect ratio borderless contact hole

Oxide etching method

Method for forming a multilevel interconnect

Semiconductor structure and method of forming a harmonic-effect-suppression structure

Method of forming trench in semiconductor substrate

Interconnect structure, interconnect layout structure, and manufacturing method thereof

Semiconductor memory device

WANG CHIH-JUNG

Method of fabricating a double-gate transistor and a tri-gate transistor on a common substrate

Patterned structure of semiconductor device and fabricating method thereof

Method of fabricating field effect transistor with fin structure

Fin-type field effect transistor

Method for fabricating MOS device

CHEN TONG-YU

Field effect transistor and manufacturing method thereof

FinFET structure

Method of forming trench in semiconductor substrate

Semiconductor structure having material layers which are level with each other and manufacturing method thereof

INFINEON TECHNOLOGIES AG

Process for forming fusible links

APPLIED MATERIALS INC

Integrated post-etch treatment for a dielectric etch process

UNITED MICROLECTRONICS CORP

Method for forming openings in low dielectric constant material layer

IBM

Method for eliminating via resistance shift in organic ILD