Inventor · disambiguated record
Jiun-Yu Lai
Also filed as: LAI JIUN-YU
4 granted patents·43 citations·filing 2000–2017
73Inventor score
Top patents by PatentIndex Score
4 records- 0184US6458013B1Method of chemical mechanical polishingASML US INC·Filed 2000·Granted Oct 1, 2002·35 cites·17 claims
- 0281US10272540B2System and method for polishing substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 30, 2019·2 cites·20 claims
- 0369US9669514B2System and method for polishing substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 6, 2017·1 cites·18 claims
- 0449US6667239B2Chemical mechanical polishing of copper-oxide damascene structuresASML US INC·Filed 2002·Granted Dec 23, 2003·5 cites·21 claims
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