Inventor
JOHANSON WILLIAM R
US9 patents
⚠️ This page may combine multiple inventors who share the name “JOHANSON WILLIAM R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUSD902165SNov 17, 2020
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC18 citations92
USD877101SMar 3, 2020
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC31 citations92
US12014906B2Jun 18, 2024
High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber
APPLIED MATERIALS INC2 citations72
US11655534B2May 23, 2023
Apparatus for reducing tungsten resistivity
APPLIED MATERIALS INC0 citations61
US11447857B2Sep 20, 2022
Methods and apparatus for reducing tungsten resistivity
APPLIED MATERIALS INC0 citations61
US11024490B2Jun 1, 2021
Magnetron having enhanced target cooling configuration
APPLIED MATERIALS INC1 citations60
US12368028B2Jul 22, 2025
Apparatus for improved high pressure plasma processing
APPLIED MATERIALS INC0 citations56
US11361982B2Jun 14, 2022
Methods and apparatus for in-situ cleaning of electrostatic chucks
APPLIED MATERIALS INC0 citations50