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Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Mar 9, 2018Filed: Mar 9, 2018Granted: Mar 3, 2020
Est. expiryMar 9, 2038(~11.7 yrs left)· nominal 20-yr term from priority
Inventors:William JohansonKirankumar Neelasandra SavandaiahPrashant Prabhakar Prabhu
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PatentIndex Score
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CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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