Inventor · disambiguated record
Kirankumar Neelasandra Savandaiah
Also filed as: SAVANDAIAH KIRANKUMAR · SAVANDAIAH KIRANKUMAR NEELASANDRA
81 granted patents·38 pending applications·452 citations·filing 2010–2025
99Inventor score
Top patents by PatentIndex Score
119 records- 0198USD1040304SDeposition ring for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Aug 27, 2024·19 cites·1 claims
- 0297US12080571B2Substrate processing module and method of moving a workpieceAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·5 cites·9 claims
- 0397US11915918B2Cleaning of sin with CCP plasma or RPS cleanAPPLIED MATERIALS INC·Filed 2021·Granted Feb 27, 2024·4 cites·8 claims
- 0496USD933726SDeposition ring for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Oct 19, 2021·40 cites·1 claims
- 0596USD888903SDeposition ring for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2018·Granted Jun 30, 2020·70 cites·1 claims
- 0694US11749542B2Apparatus, system, and method for non-contact temperature monitoring of substrate supportsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·3 cites·12 claims
- 0794USD966357STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2021·Granted Oct 11, 2022·21 cites·1 claims
- 0894US8580092B2Adjustable process spacing, centering, and improved gas conductanceHAWRYLCHAK LARA·Filed 2011·Granted Nov 12, 2013·14 cites·9 claims
- 0993USD937329SSputter target for a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2020·Granted Nov 30, 2021·19 cites·1 claims
- 1092US12347719B2Floating pin for substrate transferAPPLIED MATERIALS INC·Filed 2021·Granted Jul 1, 2025·3 cites·17 claims
- 1192US11581167B2Process kit having tall deposition ring and smaller diameter electrostatic chuck (ESC) for PVD chamberAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·2 cites·20 claims
- 1292US11289312B2Physical vapor deposition (PVD) chamber with in situ chamber cleaning capabilityAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·4 cites·18 claims
- 1392USD940765STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2020·Granted Jan 11, 2022·19 cites·1 claims
- 1492USD902165STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2020·Granted Nov 17, 2020·18 cites·1 claims
- 1591US10103012B2One-piece process kit shield for reducing the impact of an electric field near the substrateAPPLIED MATERIALS INC·Filed 2016·Granted Oct 16, 2018·3 cites·20 claims
- 1690USD970566SSputter target for a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Nov 22, 2022·12 cites·1 claims
- 1790US11049701B2Biased cover ring for a substrate processing systemAPPLIED MATERIALS INC·Filed 2017·Granted Jun 29, 2021·3 cites·19 claims
- 1890USD877101STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2018·Granted Mar 3, 2020·31 cites·1 claims
- 1990USD851613STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·33 cites·1 claims
- 2089US11898236B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted Feb 13, 2024·1 cites·17 claims
- 2189US11817331B2Substrate holder replacement with protective disk during pasting processAPPLIED MATERIALS INC·Filed 2020·Granted Nov 14, 2023·2 cites·17 claims
- 2289US11600507B2Pedestal assembly for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·2 cites·20 claims
- 2389US11600477B2Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD processAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·2 cites·19 claims
- 2489US9909206B2Process kit having tall deposition ring and deposition ring clampAPPLIED MATERIALS INC·Filed 2016·Granted Mar 6, 2018·6 cites·20 claims
- 2588USD908645SSputtering target for a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jan 26, 2021·29 cites·1 claims
- 2688USD894137STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2019·Granted Aug 25, 2020·26 cites·1 claims
- 2787US11846013B2Methods and apparatus for extended chamber for through silicon via depositionAPPLIED MATERIALS INC·Filed 2020·Granted Dec 19, 2023·2 cites·20 claims
- 2887US9953812B2Integrated process kit for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted Apr 24, 2018·2 cites·20 claims
- 2987US2024242947A1Process kit having tall deposition ring for pvd chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3086US11610799B2Electrostatic chuck having a heating and chucking capabilitiesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 21, 2023·2 cites·20 claims
- 3186US10763090B2High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this processAPPLIED MATERIALS INC·Filed 2016·Granted Sep 1, 2020·3 cites·19 claims
- 3284US11955355B2Isolated volume seals and method of forming an isolated volume within a processing chamberAPPLIED MATERIALS INC·Filed 2021·Granted Apr 9, 2024·1 cites·20 claims
- 3384US9957601B2Apparatus for gas injection in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2013·Granted May 1, 2018·3 cites·11 claims
- 3484US9343274B2Process kit shield for plasma enhanced processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted May 17, 2016·2 cites·9 claims
- 3582US9960021B2Physical vapor deposition (PVD) target having low friction padsAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·5 cites·13 claims
- 3682US9779971B2Methods and apparatus for rapidly cooling a substrateAPPLIED MATERIALS INC·Filed 2014·Granted Oct 3, 2017·4 cites·15 claims
- 3782US9464349B2Adjustable process spacing, centering, and improved gas conductanceAPPLIED MATERIALS INC·Filed 2014·Granted Oct 11, 2016·3 cites·19 claims
- 3882US9096926B2Adjustable process spacing, centering, and improved gas conductanceAPPLIED MATERIALS INC·Filed 2013·Granted Aug 4, 2015·3 cites·17 claims
- 3981US12183560B2Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD processAPPLIED MATERIALS INC·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 4081US10546733B2One-piece process kit shieldAPPLIED MATERIALS INC·Filed 2015·Granted Jan 28, 2020·4 cites·20 claims
- 4180US12043896B2Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressureAPPLIED MATERIALS INC·Filed 2023·Granted Jul 23, 2024·0 cites·20 claims
- 4280US10998209B2Substrate processing platforms including multiple processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted May 4, 2021·2 cites·19 claims
- 4380US9472443B2Selectively groundable cover ring for substrate process chambersAPPLIED MATERIALS INC·Filed 2013·Granted Oct 18, 2016·4 cites·19 claims
- 4479US12494395B2Apparatus for controlling lift pin movementAPPLIED MATERIALS INC·Filed 2024·Granted Dec 9, 2025·0 cites·12 claims
- 4579US12381101B2Semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2023·Granted Aug 5, 2025·0 cites·19 claims
- 4676US12506020B2Substrate processing module and method of moving a workpieceAPPLIED MATERIALS INC·Filed 2024·Granted Dec 23, 2025·0 cites·20 claims
- 4776US9595464B2Apparatus and method for reducing substrate sliding in process chambersAPPLIED MATERIALS INC·Filed 2015·Granted Mar 14, 2017·2 cites·13 claims
- 4875US12266551B2Apparatus, system, and method for non-contact temperature monitoring of substrate supportsAPPLIED MATERIALS INC·Filed 2023·Granted Apr 1, 2025·0 cites·20 claims
- 4975US9340866B2Substrate support with radio frequency (RF) return pathRITCHIE ALAN·Filed 2012·Granted May 17, 2016·3 cites·20 claims
- 5075US8647485B2Process kit shield for plasma enhanced processing chamberRASHEED MUHAMMAD·Filed 2012·Granted Feb 11, 2014·4 cites·7 claims
Showing the top 50 of 119 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →