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Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Dec 2, 2020Filed: Dec 2, 2020Granted: Jan 11, 2022
Est. expiryDec 2, 2040(~14.4 yrs left)· nominal 20-yr term from priority
Inventors:David GuntherJiao SongKirankumar Neelasandra SavandaiahMadan Kumar Shimoga Mylarappa
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19
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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