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Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Oct 5, 2017Filed: Oct 5, 2017Granted: Jun 18, 2019
Est. expiryOct 5, 2037(~11.2 yrs left)· nominal 20-yr term from priority
Inventors:William JohansonKirankumar Neelasandra SavandaiahAnthony Chih-Tung ChanSiew Kit HoiPrashant Prabhakar Prabhu
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PatentIndex Score
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Claims

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CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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