USD1040304SActiveUtility

Deposition ring for physical vapor deposition chamber

98
Assignee: APPLIED MATERIALS INCPriority: Dec 17, 2018Filed: Jun 25, 2021Granted: Aug 27, 2024
Est. expiryDec 17, 2038(~12.4 yrs left)· nominal 20-yr term from priority
Inventors:David GuntherCheng-Hsiung TsaiKirankumar Neelasandra Savandaiah
C23C 14/564H01J 37/32651H01J 37/3411C23C 16/4585H01J 37/32724C23C 14/50H01J 37/32477C23C 14/34C23C 14/541C23C 14/3407H01J 37/3441
98
PatentIndex Score
19
Cited by
71
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a deposition ring for a physical vapor deposition chamber, as shown and described.

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