Inventor · disambiguated record
Judocus M. D. Stoeldrayer
Also filed as: STOELDRAYER JUDOCUS M D
2 granted patents·59 citations·filing 1994–1996
65Inventor score
Technology areasG03F
Files withASM LITHOGRAPHY BV2
Top patents by PatentIndex Score
2 records- 0174US6028660AIllumination unit for an optical apparatusASM LITHOGRAPHY BV·Filed 1996·Granted Feb 22, 2000·37 cites·27 claims
- 0266US5508528AIllumination unit having a facility for preventing contamination of optical components, and photolithographic apparatus including such an illumination unitASM LITHOGRAPHY BV·Filed 1994·Granted Apr 16, 1996·22 cites·6 claims
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