Inventor
BEAUDRY CHRISTOPHER LAURENT
US10 patents
Patents
10 patentsUS7163018B2Jan 16, 2007
Single wafer cleaning method to reduce particle defects on a wafer surface
APPLIED MATERIALS INC12 citations83
USD984895SMay 2, 2023
Packaging insert for a process chamber component
APPLIED MATERIALS INC11 citations79
US7341065B2Mar 11, 2008
Single wafer cleaning method to reduce particle defects on a wafer surface
APPLIED MATERIALS INC4 citations61
US12424481B2Sep 23, 2025
Modular substrate support assembly
APPLIED MATERIALS INC0 citations60
US11920234B2Mar 5, 2024
Yttrium oxide based coating composition
APPLIED MATERIALS INC0 citations59
US11661650B2May 30, 2023
Yttrium oxide based coating composition
APPLIED MATERIALS INC0 citations59
US12482692B2Nov 25, 2025
Efficient dechucking and particle management in process chambers
APPLIED MATERIALS INC0 citations58
USD1092213SSep 9, 2025
Packaging insert for a process chamber component
APPLIED MATERIALS INC0 citations56
US12100613B2Sep 24, 2024
Minimal contact packaging for process chamber components
APPLIED MATERIALS INC0 citations56
US12404584B2Sep 2, 2025
Parallel atomic layer deposition of target element interiors
APPLIED MATERIALS INC0 citations41