Inventor
EGASHIRA KEISUKE
JP20 patents
⚠️ This page may combine multiple inventors who share the name “EGASHIRA KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10998186B2May 4, 2021
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US10566182B2Feb 18, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD3 citations72
US10950465B2Mar 16, 2021
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US10692739B2Jun 23, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US10576493B2Mar 3, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD6 citations71
US10504718B2Dec 10, 2019
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US10395950B2Aug 27, 2019
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD5 citations71
US9865452B2Jan 9, 2018
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46
US10366877B2Jul 30, 2019
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations40
US10867814B2Dec 15, 2020
Liquid processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39
US9922849B2Mar 20, 2018
Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof
TOKYO ELECTRON LTD0 citations37
KUBOTA KK
8 patentsUS11950298B2Apr 2, 2024
Communication processing system for working machine and communication processing method for working machine
KUBOTA KK0 citations62
US10986674B2Apr 20, 2021
Communication processing system for working machine and communication processing method for working machine
KUBOTA KK0 citations62
US10967834B2Apr 6, 2021
Working machine, anti-theft system for the same, anti-theft method for the same
KUBOTA KK1 citations62
US10904930B2Jan 26, 2021
Communication system for working machine, mobile terminal, and communication processing method for working machine
KUBOTA KK0 citations62
US11425560B2Aug 23, 2022
Communication system for working machine and communication processing method for working machine
KUBOTA KK0 citations51
US10939355B2Mar 2, 2021
Communication device for working machine, mobile terminal, communication system for working machine, and communication processing method for working machine
KUBOTA KK0 citations51
US10904819B2Jan 26, 2021
Communication device for working machine, mobile terminal, communication system for working machine, and communication processing method for working machine
KUBOTA KK0 citations51
US11951939B2Apr 9, 2024
Anti-theft system for working machine, anti-theft control method of the working machine, and the working machine
KUBOTA KK0 citations50