Inventor · disambiguated record
Kaoru Fujihara
Also filed as: FUJIHARA KAORU
8 granted patents·2 pending applications·135 citations·filing 1994–2016
84Inventor score
Top patents by PatentIndex Score
10 records- 0189US5910727AElectrical inspecting apparatus with ventilation systemTOKYO ELECTRON LTD·Filed 1996·Granted Jun 8, 1999·103 cites·15 claims
- 0268US7508518B2Particle measuring method and particle measuring apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Mar 24, 2009·2 cites·12 claims
- 0361US8608422B2Particle sticking prevention apparatus and plasma processing apparatusMORIYA TSUYOSHI·Filed 2004·Granted Dec 17, 2013·7 cites·24 claims
- 0461US5445521AHeat treating method and deviceTOKYO ELECTRON LTD·Filed 1994·Granted Aug 29, 1995·21 cites·4 claims
- 0560US8008211B2Pattern forming method, semiconductor device manufacturing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Aug 30, 2011·1 cites·9 claims
- 0652US8911955B2Virus detection device and virus detection methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 16, 2014·0 cites·5 claims
- 0747US2009206253A1Substrate inspection method, substrate inspection apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0845US10139334B2Particulate measurement deviceTOKYO ELECTRON LTD·Filed 2016·Granted Nov 27, 2018·0 cites·7 claims
- 0945US6883283B2Semiconductor manufacturing facility and a semiconductor manufacturing methodTAISEI CORP·Filed 2002·Granted Apr 26, 2005·1 cites·6 claims
- 1036US2011168330A1Support structure, load lock apparatus, processing apparatus and transfer mechanismTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
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