Inventor · disambiguated record
Hans Hirscher
Also filed as: HIRSCHER HANS
8 granted patents·1 pending application·233 citations·filing 1988–2015
89Inventor score
Top patents by PatentIndex Score
9 records- 0184US5033538AWorkpiece carrier for a disk-shaped workpiece as well as a vacuum process spaceBALZERS HOCHVAKUUM·Filed 1990·Granted Jul 23, 1991·82 cites·22 claims
- 0279US5180000AWorkpiece carrier with suction slot for a disk-shaped workpieceBALZERS HOCHVAKUUM·Filed 1991·Granted Jan 19, 1993·72 cites·7 claims
- 0367US4903754AMethod and apparatus for the transmission heat to or from plate like objectBALZERS HOCHVAKUUM·Filed 1988·Granted Feb 27, 1990·34 cites·15 claims
- 0465US5688381AMagnetron atomization source and method of use thereofBALZERS HOCHVAKUUM·Filed 1995·Granted Nov 18, 1997·17 cites·32 claims
- 0554US6776881B2Magnetron atomization source and method of use thereofUNAXIS BALZERS AG·Filed 2002·Granted Aug 17, 2004·2 cites·35 claims
- 0653US5997697AMagnetron sputtering source and method of use thereofBALZERS HOCHVAKUUM·Filed 1996·Granted Dec 7, 1999·10 cites·34 claims
- 0744US5051054AElevating table and transporting methodBALZERS HOCHVAKUUM·Filed 1990·Granted Sep 24, 1991·13 cites·26 claims
- 0836US6540883B1Magnetron sputtering source and method of use thereofUNAXIS BALZERS AG·Filed 1999·Granted Apr 1, 2003·3 cites·49 claims
- 0930US2017175255A1Method of sputter deposition of a film on an essentially plane extended surface of a substrateEVATEC ADVANCED TECH AG·Filed 2015·Application pending·0 cites
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