Inventor · disambiguated record
Sheng-Chun Yang
Also filed as: YANG SHENG-CHUN
20 granted patents·7 pending applications·9 citations·filing 2001–2025
89Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD26
Top patents by PatentIndex Score
27 records- 0186US12509773B2Semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Dec 30, 2025·0 cites·20 claims
- 0285US2025364277A1Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0384US12381068B2Radio frequency screen for an ultraviolet lamp systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
- 0483US12084769B2Semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0580US12482671B2Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·20 claims
- 0680US12020910B2Radio frequency screen for an ultraviolet lamp systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 25, 2024·0 cites·20 claims
- 0779US2025349555A1Systems and methods for processing a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0878US11594401B2Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 28, 2023·1 cites·20 claims
- 0975US12249493B2Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 1073US10879099B2Humidity control in storage deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·2 cites·20 claims
- 1173US2023098570A1Gachemical vapor deposition apparatus with cleaning gas flow guiding memberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1271US11851761B2Semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 1371US2024379380A1Systems and methods for processing a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1469US11670491B2Radio frequency screen for an ultraviolet lamp systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 6, 2023·0 cites·20 claims
- 1568US11735436B2Semiconductor fabrication apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 22, 2023·0 cites·20 claims
- 1667US2022384239A1Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1765US11972957B2Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 30, 2024·0 cites·20 claims
- 1864US12394635B2Systems and methods for processing a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 19, 2025·0 cites·20 claims
- 1964US2022356574A1Cvd device pumping linerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2060US11443961B2Semiconductor fabrication apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 13, 2022·0 cites·20 claims
- 2159US12055228B2Valve for throttling gas flow from a semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 6, 2024·0 cites·20 claims
- 2257US11532459B2Chemical vapor deposition apparatus with cleaning gas flow guiding memberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 20, 2022·0 cites·20 claims
- 2355US12283514B2Method and system for processing waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·20 claims
- 2455US11685994B2CVD device pumping linerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 27, 2023·0 cites·20 claims
- 2552US2024360551A1Heating module and program control method for pumping line of semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2648US6470720B1Steering wheel lockFiled 2001·Granted Oct 29, 2002·6 cites·5 claims
- 2744US11183404B2Diffuser and semiconductor processing system using sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 23, 2021·0 cites·17 claims
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