Inventor
VERBAAS Melvin
US13 patents
⚠️ This page may combine multiple inventors who share the name “VERBAAS Melvin”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
9 patentsUS11306395B2Apr 19, 2022
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV7 citations84
US11976361B2May 7, 2024
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV2 citations72
US11530876B2Dec 20, 2022
Vertical batch furnace assembly comprising a cooling gas supply
ASM IP HOLDING BV2 citations71
US11417545B2Aug 16, 2022
Radiation shield
ASM IP HOLDING BV3 citations71
US10692741B2Jun 23, 2020
Radiation shield
ASM IP HOLDING BV3 citations71
US12424464B2Sep 23, 2025
Radiation shield
ASM IP HOLDING BV0 citations60
US12130084B2Oct 29, 2024
Vertical batch furnace assembly comprising a cooling gas supply
ASM IP HOLDING BV0 citations60
US12276023B2Apr 15, 2025
Showerhead assembly for distributing a gas within a reaction chamber
ASM IP HOLDING BV0 citations51
US12002661B2Jun 4, 2024
Susceptor having cooling device
ASM IP HOLDING BV0 citations51
TOKYO ELECTRON LTD
4 patentsUS11225716B2Jan 18, 2022
Internally cooled multi-hole injectors for delivery of process chemicals
TOKYO ELECTRON LTD2 citations72
US12094753B2Sep 17, 2024
Stage device and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11774298B2Oct 3, 2023
Multi-point thermocouples and assemblies for ceramic heating structures
TOKYO ELECTRON LTD0 citations56
US12476091B2Nov 18, 2025
Electrostatic chuck and method of operation for plasma processing
TOKYO ELECTRON LTD0 citations50