Susceptor having cooling device

Abstract

A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.

What is claimed is: 
     
       1. A susceptor comprising:
 a plate part; 
 a first heater configured to heat a first portion of the plate part, wherein the first heater is disposed in the first portion; 
 a second heater configured to heat a second portion of the plate part, the second portion being different from the first portion, wherein the second heater is disposed in the second portion; 
 a heat insulating portion configured to thermally insulate the first portion and the second portion from each other on an upper surface side of the plate part, the heat insulating portion including a grooved portion provided in the plate part on the upper surface side, wherein the grooved portion is located between the first heater and the second heater; 
 a cooling device configured to cool the plate part right below the grooved portion, at least a part of the cooling device extends below the grooved portion; 
 a first closing part provided on the first portion and a part of the grooved portion to narrow a groove in the grooved portion without contacting the second portion; and 
 a second closing part provided on the second portion and a part of the grooved portion to narrow the groove in the grooved portion without contacting the first portion and the first closing part. 
 
     
     
       2. The susceptor according to  claim 1 , wherein the cooling device is attached to the plate part right below the grooved portion. 
     
     
       3. The susceptor according to  claim 1 , wherein the cooling device is embedded in the plate part right below a groove in the grooved portion. 
     
     
       4. The susceptor according to  claim 3 , wherein the second portion surrounds the first portion as viewed in plan, and the cooling device extends along the grooved portion in a plan view. 
     
     
       5. The susceptor according to  claim 1 , wherein the cooling device is embedded in the plate part at positions on opposite sides of a portion of the plate part below a groove in the grooved portion. 
     
     
       6. The susceptor according to  claim 5 , wherein the second portion surrounds the first portion in a plan view, and the cooling device extends along the grooved portion in a plan view. 
     
     
       7. The susceptor according to  claim 1 , wherein the cooling device is embedded in the plate part at positions on opposite sides of the grooved portion. 
     
     
       8. The susceptor according to  claim 1 , wherein the first heater and the second heater are thin-film heat generating member provided on the plate part. 
     
     
       9. The susceptor according to  claim 1 , wherein the cooling device has a cooling medium passage through which a cooling medium flows;
 the cooling medium passage includes a first cooling medium passage passing through the first portion, and a second cooling medium passage connecting to the first cooling medium passage and passing through a portion of the plate part right below a groove in the grooved portion; 
 a heat transfer inhibiting part for hindering heat transfer between the cooling medium and the plate part is provided in the first cooling medium passage; and 
 the cooling medium and the plate part contact each other in the second cooling medium passage. 
 
     
     
       10. The susceptor according to  claim 9 , wherein the grooved portion is provided in annular form in a plan view;
 at least two sets of the first cooling medium passage and the second cooling medium passage are provided; and 
 positions at which the cooling medium enters the second cooling medium passage from the first cooling medium passage are provided generally at equal intervals along the grooved portion. 
 
     
     
       11. The susceptor according to  claim 1 , wherein the grooved portion separates the first portion from the second portion. 
     
     
       12. The susceptor according to  claim 1 , wherein the first heater is in annular form in the first portion. 
     
     
       13. The susceptor according to  claim 1 , further comprising a third heater configured to heat a third portion of the plate part, the third portion being different from the first portion and the second portion, wherein the third heater is disposed in the third portion. 
     
     
       14. The susceptor according to  claim 13 , wherein the third portion comprises an outer edge of the plate part. 
     
     
       15. The susceptor according to  claim 1 , wherein the susceptor is configured to produce a temperature difference on the upper side surface of the first portion from the upper side surface of the second portion.