Inventor · disambiguated record
Melvin Verbaas
Also filed as: VERBAAS Melvin
13 granted patents·9 pending applications·19 citations·filing 2016–2024
87Inventor score
Top patents by PatentIndex Score
22 records- 0196US11976361B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2022·Granted May 7, 2024·2 cites·14 claims
- 0295US11306395B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2017·Granted Apr 19, 2022·7 cites·14 claims
- 0394US11417545B2Radiation shieldASM IP HOLDING BV·Filed 2020·Granted Aug 16, 2022·3 cites·11 claims
- 0490US11530876B2Vertical batch furnace assembly comprising a cooling gas supplyASM IP HOLDING BV·Filed 2021·Granted Dec 20, 2022·2 cites·15 claims
- 0589US11225716B2Internally cooled multi-hole injectors for delivery of process chemicalsTOKYO ELECTRON LTD·Filed 2019·Granted Jan 18, 2022·2 cites·17 claims
- 0685US10692741B2Radiation shieldASM IP HOLDING BV·Filed 2017·Granted Jun 23, 2020·3 cites·16 claims
- 0779US12424464B2Radiation shieldASM IP HOLDING BV·Filed 2022·Granted Sep 23, 2025·0 cites·17 claims
- 0871US12476091B2Electrostatic chuck and method of operation for plasma processingTOKYO ELECTRON LTD·Filed 2023·Granted Nov 18, 2025·0 cites·14 claims
- 0970US12002661B2Susceptor having cooling deviceASM IP HOLDING BV·Filed 2020·Granted Jun 4, 2024·0 cites·15 claims
- 1067US12130084B2Vertical batch furnace assembly comprising a cooling gas supplyASM IP HOLDING BV·Filed 2022·Granted Oct 29, 2024·0 cites·15 claims
- 1164US2024376602A1Deposition Systems with Rotating Electrostatic Chuck and Methods ThereofTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1259US2025299983A1Ceramic heater assembly with internal and external heating functionality useful in the fabrication of microelectronic devicesTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1357US2025227851A1Substrate support with printed heaterTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1456US12094753B2Stage device and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Sep 17, 2024·0 cites·8 claims
- 1555US2024304491A1Ceramic Pedestal Shaft with Heated/Cooled Gas TubeTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1653US12276023B2Showerhead assembly for distributing a gas within a reaction chamberASM IP HOLDING BV·Filed 2018·Granted Apr 15, 2025·0 cites·21 claims
- 1752US11774298B2Multi-point thermocouples and assemblies for ceramic heating structuresTOKYO ELECTRON LTD·Filed 2020·Granted Oct 3, 2023·0 cites·23 claims
- 1851US2017051406A1Susceptor and substrate processing apparatusASM IP HOLDING BV·Filed 2016·Application pending·0 cites
- 1947US2022178024A1Furnace with metal furnace tubeTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 2046US2021159102A1THERMAL TREATMENTS USING A PLURALITY OF EMBEDDED RESISTANCE TEMPERATURE DETECTORS (RTDs)TOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 2146US2021242039A1Substrate processing system and method to reduce a number of external connectors provided on the systemTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 2246US2021175108A1Multi-polar chuck for processing of microelectronic workpiecesTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →