Inventor
OIKAWA FUMITOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “OIKAWA FUMITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
10 patentsUS6851152B2Feb 8, 2005
Substrate cleaning apparatus
EBARA CORP28 citations92
US6248009B1Jun 19, 2001
Apparatus for cleaning substrate
EBARA CORP30 citations92
US6412134B1Jul 2, 2002
Cleaning device and substrate cleaning apparatus
EBARA CORP23 citations91
US6842933B2Jan 18, 2005
Substrate cleaning apparatus and cleaning member
EBARA CORP5 citations71
US6651287B2Nov 25, 2003
Substrate cleaning apparatus and cleaning member
EBARA CORP10 citations71
US12205831B2Jan 21, 2025
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11948811B2Apr 2, 2024
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US12370578B2Jul 29, 2025
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US12100587B2Sep 24, 2024
Substrate cleaning apparatus and cleaning method of substrate
EBARA CORP0 citations50