Inventor · disambiguated record
Errol Antonio C. Sanchez
Also filed as: SANCHEZ ERROL · SANCHEZ ERROL A C · SANCHEZ ERROL ANTONIO · SANCHEZ ERROL ANTONIO C
98 granted patents·47 pending applications·1,545 citations·filing 2000–2025
99Inventor score
Files withAPPLIED MATERIALS INC119SANCHEZ ERROL ANTONIO C7HUANG YI-CHIAU5SANCHEZ ERROL3CARLSON DAVID K2
Top patents by PatentIndex Score
145 records- 0198US8647439B2Method of epitaxial germanium tin alloy surface preparationSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Feb 11, 2014·392 cites·18 claims
- 0297US9923081B1Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2017·Granted Mar 20, 2018·23 cites·20 claims
- 0397US8313804B2Apparatus and methods for chemical vapor depositionCARLSON DAVID K·Filed 2011·Granted Nov 20, 2012·17 cites·18 claims
- 0497US8309440B2Method and apparatus for cleaning a substrate surfaceSANCHEZ ERROL ANTONIO C·Filed 2011·Granted Nov 13, 2012·233 cites·20 claims
- 0597US8008166B2Method and apparatus for cleaning a substrate surfaceAPPLIED MATERIALS INC·Filed 2008·Granted Aug 30, 2011·236 cites·20 claims
- 0697US7132338B2Methods to fabricate MOSFET devices using selective deposition processAPPLIED MATERIALS INC·Filed 2004·Granted Nov 7, 2006·149 cites·21 claims
- 0796US7172792B2Method for forming a high quality low temperature silicon nitride filmAPPLIED MATERIALS INC·Filed 2002·Granted Feb 6, 2007·135 cites·43 claims
- 0895US12163229B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0995US11821088B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·2 cites·19 claims
- 1094US9856580B2Apparatus for impurity layered epitaxyAPPLIED MATERIALS INC·Filed 2014·Granted Jan 2, 2018·6 cites·9 claims
- 1192US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 1292US8603898B2Method for forming group III/V conformal layers on silicon substratesBAO XINYU·Filed 2012·Granted Dec 10, 2013·19 cites·20 claims
- 1392US7967911B2Apparatus and methods for chemical vapor depositionAPPLIED MATERIALS INC·Filed 2007·Granted Jun 28, 2011·12 cites·11 claims
- 1491US11021795B2Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·4 cites·19 claims
- 1591US7976634B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·15 claims
- 1690US8652951B2Selective epitaxial germanium growth on silicon-trench fill and in situ dopingAPPLIED MATERIALS INC·Filed 2013·Granted Feb 18, 2014·11 cites·15 claims
- 1790US7737007B2Methods to fabricate MOSFET devices using a selective deposition processAPPLIED MATERIALS INC·Filed 2008·Granted Jun 15, 2010·12 cites·16 claims
- 1889US9512520B2Semiconductor substrate processing systemSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Dec 6, 2016·9 cites·17 claims
- 1988US9029264B2Methods for depositing a tin-containing layer on a substrateAPPLIED MATERIALS INC·Filed 2013·Granted May 12, 2015·3 cites·12 claims
- 2088US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 2188US6582522B2Emissivity-change-free pumping plate kit in a single wafer chamberAPPLIED MATERIALS INC·Filed 2001·Granted Jun 24, 2003·37 cites·13 claims
- 2287US12091749B2Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outletAPPLIED MATERIALS INC·Filed 2021·Granted Sep 17, 2024·1 cites·18 claims
- 2387US9865735B2Horizontal gate all around and FinFET device isolationAPPLIED MATERIALS INC·Filed 2016·Granted Jan 9, 2018·4 cites·14 claims
- 2487US7439142B2Methods to fabricate MOSFET devices using a selective deposition processAPPLIED MATERIALS INC·Filed 2006·Granted Oct 21, 2008·10 cites·34 claims
- 2586US10205002B2Method of epitaxial growth shape control for CMOS applicationsAPPLIED MATERIALS INC·Filed 2017·Granted Feb 12, 2019·4 cites·19 claims
- 2686US7560352B2Selective depositionAPPLIED MATERIALS INC·Filed 2006·Granted Jul 14, 2009·15 cites·34 claims
- 2785US7732269B2Method of ultra-shallow junction formation using Si film alloyed with carbonAPPLIED MATERIALS INC·Filed 2007·Granted Jun 8, 2010·10 cites·2 claims
- 2885US2025066918A1Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2984US11733081B2Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing systemAPPLIED MATERIALS INC·Filed 2021·Granted Aug 22, 2023·1 cites·20 claims
- 3084US2025320628A1Epi isolation plate and parallel block purge flow tuning for growth rate and uniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3183US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 3283US11145761B2Horizontal gate all around and FinFET device isolationAPPLIED MATERIALS INC·Filed 2019·Granted Oct 12, 2021·2 cites·17 claims
- 3383US9159554B2Structure and method of forming metamorphic heteroepi materials and III-V channel structures on siAPPLIED MATERIALS INC·Filed 2014·Granted Oct 13, 2015·5 cites·17 claims
- 3483US7838431B2Method for surface treatment of semiconductor substratesAPPLIED MATERIALS INC·Filed 2008·Granted Nov 23, 2010·7 cites·24 claims
- 3582US10026613B2Utilization of angled trench for effective aspect ratio trapping of defects in strain-relaxed heteroepitaxy of semiconductor filmsAPPLIED MATERIALS INC·Filed 2017·Granted Jul 17, 2018·2 cites·12 claims
- 3682US10002759B2Method of forming structures with V shaped bottom on silicon substrateAPPLIED MATERIALS INC·Filed 2017·Granted Jun 19, 2018·3 cites·19 claims
- 3782US7709391B2Methods for in-situ generation of reactive etch and growth specie in film formation processesAPPLIED MATERIALS INC·Filed 2006·Granted May 4, 2010·8 cites·20 claims
- 3881US11860973B2Method and system for foreline deposition diagnostics and controlAPPLIED MATERIALS INC·Filed 2020·Granted Jan 2, 2024·1 cites·20 claims
- 3981US10727093B2Light pipe window structure for low pressure thermal processesAPPLIED MATERIALS INC·Filed 2015·Granted Jul 28, 2020·3 cites·16 claims
- 4081US2025283251A1Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4180US10276688B2Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 30, 2019·2 cites·18 claims
- 4280US9406507B2Utilization of angled trench for effective aspect ratio trapping of defects in strain relaxed heteroepitaxy of semiconductor filmsAPPLIED MATERIALS INC·Filed 2015·Granted Aug 2, 2016·2 cites·12 claims
- 4380US6559039B2Doped silicon deposition process in resistively heated single wafer chamberAPPLIED MATERIALS INC·Filed 2001·Granted May 6, 2003·23 cites·41 claims
- 4480US2024337020A1Gas injector for epitaxy and cvd chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4580US2024254655A1Epi isolation plate and parallel block purge flow tuning for growth rate and uniformityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4679US12338547B2Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2023·Granted Jun 24, 2025·0 cites·26 claims
- 4779US9347696B2Compact ampoule thermal management systemAPPLIED MATERIALS INC·Filed 2013·Granted May 24, 2016·1 cites·19 claims
- 4879US7365029B2Method for silicon nitride chemical vapor depositionAPPLIED MATERIALS INC·Filed 2005·Granted Apr 29, 2008·6 cites·11 claims
- 4979US2025132155A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 5079US2025087485A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
Showing the top 50 of 145 patent records by PatentIndex Score.
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