Inventor
UMEKAWA ATSUSHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “UMEKAWA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
7 patentsUSD901406SNov 10, 2020
Inner tube of reactor for semiconductor fabrication
KOKUSAI ELECTRIC CORP6 citations83
US12050138B2Jul 30, 2024
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP2 citations72
US11300456B2Apr 12, 2022
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP3 citations72
US10640872B2May 5, 2020
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations72
US10998205B2May 4, 2021
Substrate processing apparatus and manufacturing method of semiconductor device
KOKUSAI ELECTRIC CORP5 citations70
US12065741B2Aug 20, 2024
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US11365482B2Jun 21, 2022
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
HITACHI INT ELECTRIC INC
5 patentsUS10228291B2Mar 12, 2019
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC1 citations62
US11694907B2Jul 4, 2023
Substrate processing apparatus, recording medium, and fluid circulation mechanism
HITACHI INT ELECTRIC INC0 citations51
US10684174B2Jun 16, 2020
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC0 citations51
US9646862B2May 9, 2017
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC1 citations50
US11198935B2Dec 14, 2021
Heating part, substrate processing apparatus, and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations47