USD901406SActiveUtility

Inner tube of reactor for semiconductor fabrication

56
Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 20, 2019Filed: Sep 9, 2019Granted: Nov 10, 2020
Est. expiryMar 20, 2039(~12.7 yrs left)· nominal 20-yr term from priority
Inventors:Toru KagayaAtsushi Umekawa
56
PatentIndex Score
6
Cited by
39
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an inner tube of reactor for semiconductor fabrication, as shown and described.

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