Inventor · disambiguated record
Toru Kagaya
Also filed as: KAGAYA TORU
18 granted patents·12 pending applications·181 citations·filing 2002–2023
94Inventor score
Files withHITACHI INT ELECTRIC INC13KOKUSAI ELECTRIC CORP7OKUDA KAZUYUKI4SAKAI MASANORI2HITACHI KOKUSAI ELECTRIC1
Top patents by PatentIndex Score
30 records- 0196US7900580B2Substrate processing apparatus and reaction containerHITACHI INT ELECTRIC INC·Filed 2007·Granted Mar 8, 2011·27 cites·13 claims
- 0295US6905549B2Vertical type semiconductor device producing apparatusHITACHI INT ELECTRIC INC·Filed 2003·Granted Jun 14, 2005·60 cites·12 claims
- 0393US8261692B2Substrate processing apparatus and reaction containerKONTANI TADASHI·Filed 2010·Granted Sep 11, 2012·10 cites·7 claims
- 0490US8047158B2Substrate processing apparatus and reaction containerHITACHI INT ELECTRIC INC·Filed 2007·Granted Nov 1, 2011·8 cites·11 claims
- 0585US8366868B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2012·Granted Feb 5, 2013·4 cites·2 claims
- 0681USD839219SBoat for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Jan 29, 2019·21 cites·1 claims
- 0780US7622396B2Method of producing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2008·Granted Nov 24, 2009·2 cites·20 claims
- 0879US8211802B2Substrate processing apparatusOKUDA KAZUYUKI·Filed 2010·Granted Jul 3, 2012·3 cites·11 claims
- 0975USD888196SGas nozzle for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted Jun 23, 2020·16 cites·1 claims
- 1073USD1020668SGas injector for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Apr 2, 2024·5 cites·1 claims
- 1165USD853979SReaction tubeHITACHI INT ELECTRIC INC·Filed 2018·Granted Jul 16, 2019·10 cites·1 claims
- 1262US2011176967A1Vertical type semiconductor device producing apparatusOKUDA KAZUYUKI·Filed 2011·Application pending·0 cites
- 1359US2005217577A1Vertical type semiconductor device producing apparatusHITACHI INT ELECTRIC INC·Filed 2005·Application pending·0 cites
- 1457US7713582B2Substrate processing method for film formationHITACHI KOKUSAI ELECTRIC·Filed 2008·Granted May 11, 2010·0 cites·11 claims
- 1557US2009178694A1Substrate processing apparatusOKUDA KAZUYUKI·Filed 2009·Application pending·0 cites
- 1657US2013133696A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 1757US2009186467A1Substrate Processing Apparatus and Producing Method of Semiconductor DeviceSAKAI MASANORI·Filed 2009·Application pending·0 cites
- 1856USD901406SInner tube of reactor for semiconductor fabricationKOKUSAI ELECTRIC CORP·Filed 2019·Granted Nov 10, 2020·6 cites·1 claims
- 1955US12503768B2Substrate processing apparatus, method of manufacturing semiconductor device, method of processing substrate, and gas injectorKOKUSAI ELECTRIC CORP·Filed 2022·Granted Dec 23, 2025·0 cites·14 claims
- 2055US2023332290A1Substrate processing apparatus, nozzle assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 2152US8598047B2Substrate processing apparatus and producing method of semiconductor deviceSAKAI MASANORI·Filed 2011·Granted Dec 3, 2013·0 cites·9 claims
- 2250US2006060142A1Substrate processing apparatusOKUDA KAZUYUKI·Filed 2005·Application pending·0 cites
- 2349USD889596SGas nozzle for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2018·Granted Jul 7, 2020·5 cites·1 claims
- 2448USD992762SProtector for maintenance on semiconductor manufacturing equipmentsKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 18, 2023·1 cites·1 claims
- 2548US2004025786A1Substrate processing apparatus and reaction containerFiled 2003·Application pending·0 cites
- 2647US2006150905A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2003·Application pending·0 cites
- 2744US2006258174A1Substrate treatment apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2004·Application pending·0 cites
- 2843US2003221779A1Substrate processing apparatusFiled 2003·Application pending·0 cites
- 2942USD925481SInlet liner for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jul 20, 2021·3 cites·1 claims
- 3037US2003024477A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →