USD1020668SActiveUtility

Gas injector for substrate processing apparatus

Assignee: KOKUSAI ELECTRIC CORPPriority: Jun 16, 2021Filed: Dec 15, 2021Granted: Apr 2, 2024

Est. expiryJun 16, 2041(~14.9 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a gas injector for substrate processing apparatus, as shown and described.

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