Inventor

VAN ELP JAN

NL7 patents

⚠️ This page may combine multiple inventors who share the name “VAN ELP JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents

US6678037B2Jan 13, 2004

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV32 citations92

US6864957B2Mar 8, 2005

Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method

ASML NETHERLANDS BV40 citations86

US7486384B2Feb 3, 2009

Lithographic support structure

ASML NETHERLANDS BV11 citations77

US6930760B2Aug 16, 2005

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV10 citations73

US7245357B2Jul 17, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV8 citations68

US7630060B2Dec 8, 2009

Device manufacturing method, lithographic apparatus and device manufactured thereby

ASML NETHERLANDS BV1 citations52

VAN ELP JAN

1 patent

US8105457B2Jan 31, 2012

Method for joining at least a first member and a second member, lithographic apparatus and device manufacturing method, as well as a device manufactured thereby

VAN ELP JAN4 citations55