Inventor
KORIAKIN ANTON
KR12 patents
Patents
12 patentsUS10908503B2Feb 2, 2021
Apparatus for treating substrate
SEMES CO LTD7 citations82
US11004675B2May 11, 2021
Substrate cleaning composition, substrate treating method, and substrate treating apparatus
SEMES CO LTD2 citations71
US10915026B2Feb 9, 2021
Substrate treating apparatus and substrate treating method
SEMES CO LTD2 citations71
US11530375B2Dec 20, 2022
Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus
SEMES CO LTD0 citations60
US11410862B2Aug 9, 2022
Apparatus for processing substrate including cooling member closer to central axis than heating member
SEMES CO LTD1 citations60
US12198923B2Jan 14, 2025
Substrate processing method and substrate processing system
SEMES CO LTD0 citations59
US11977332B2May 7, 2024
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations55
US11940734B2Mar 26, 2024
Apparatus and method for treating substrate
SEMES CO LTD0 citations49
US10773281B2Sep 15, 2020
Anhydrous substrate cleaning composition, substrate treating method, and substrate treating apparatus
SEMES CO LTD0 citations49
US12429283B2Sep 30, 2025
Method and apparatus for treating a substrate
SEMES CO LTD0 citations48
US11887866B2Jan 30, 2024
Supercritical processing apparatus
SEMES CO LTD0 citations47
US10711228B2Jul 14, 2020
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations39