Inventor
HEO CHAN YOUNG
KR12 patents
⚠️ This page may combine multiple inventors who share the name “HEO CHAN YOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
11 patentsUS9275847B2Mar 1, 2016
Recycling unit and substrate treating apparatus
SEMES CO LTD28 citations91
US10908503B2Feb 2, 2021
Apparatus for treating substrate
SEMES CO LTD7 citations82
US10490427B2Nov 26, 2019
Apparatus for treating substrate
SEMES CO LTD9 citations82
US11890639B2Feb 6, 2024
Apparatus for treating substrate
SEMES CO LTD2 citations71
US11621159B2Apr 4, 2023
Method for treating substrate
SEMES CO LTD2 citations71
US11004675B2May 11, 2021
Substrate cleaning composition, substrate treating method, and substrate treating apparatus
SEMES CO LTD2 citations71
US10915026B2Feb 9, 2021
Substrate treating apparatus and substrate treating method
SEMES CO LTD2 citations71
US11530375B2Dec 20, 2022
Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus
SEMES CO LTD0 citations60
US11410862B2Aug 9, 2022
Apparatus for processing substrate including cooling member closer to central axis than heating member
SEMES CO LTD1 citations60
US11682577B2Jun 20, 2023
Spin head, apparatus and method for treating a substrate including the spin head
SEMES CO LTD0 citations48
US11887866B2Jan 30, 2024
Supercritical processing apparatus
SEMES CO LTD0 citations47