Inventor
JEONG JI SOO
KR6 patents
⚠️ This page may combine multiple inventors who share the name “JEONG JI SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS10908503B2Feb 2, 2021
Apparatus for treating substrate
SEMES CO LTD7 citations82
US11530375B2Dec 20, 2022
Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus
SEMES CO LTD0 citations60
US11410862B2Aug 9, 2022
Apparatus for processing substrate including cooling member closer to central axis than heating member
SEMES CO LTD1 citations60