Inventor

HOSHIKA RYUICHI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “HOSHIKA RYUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

5 patents

US8054447B2Nov 8, 2011

Exposure apparatus, exposure method, method for producing device, and optical part

NIKON CORP11 citations83

US7812926B2Oct 12, 2010

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

NIKON CORP3 citations60

US10088760B2Oct 2, 2018

Exposure apparatus, exposure method, method for producing device, and optical part

NIKON CORP0 citations51

US9618854B2Apr 11, 2017

Exposure method, exposure apparatus, and device manufacturing method

NIKON CORP0 citations51

US9182685B2Nov 10, 2015

Exposure apparatus, exposure method, method for producing device, and optical part

NIKON CORP0 citations51

SHIRAISHI KENICHI

2 patents

US8064039B2Nov 22, 2011

Exposure method, exposure apparatus, and device manufacturing method

SHIRAISHI KENICHI6 citations72

US9335639B2May 10, 2016

Exposure method, exposure apparatus, and device manufacturing method

SHIRAISHI KENICHI0 citations51

NAGASAKA HIROYUKI

1 patent

US9019469B2Apr 28, 2015

Exposure apparatus, exposure method, method for producing device, and optical part

NAGASAKA HIROYUKI0 citations51

KOKUBUN TAKAO

1 patent

US8724075B2May 13, 2014

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

KOKUBUN TAKAO0 citations43