Inventor

ASANO MASAFUMI

JP42 patents

⚠️ This page may combine multiple inventors who share the name “ASANO MASAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASANO MASAFUMI

TOSHIBA KK

Exposure method and apparatus

Exposure method, exposure system and recording medium

Focus monitoring method, exposure apparatus, and exposure mask

Method of manufacturing semiconductor device

Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle

Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same

Exposure control method and method of manufacturing a semiconductor device

Focus monitor method and mask

Monitoring method, exposure method, a manufacturing method for a semiconductor device, including an etching method and exposure processing unit

Simulation model creating method, computer program product, and method of manufacturing a semiconductor device

Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus

System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices

Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle

Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device

Pattern inspection method, pattern formation control method, and pattern inspection apparatus

System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices

Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device

Testing system, a computer implemented testing method and a method for manufacturing electronic devices

Method and system for managing semiconductor manufacturing device

Method for evaluating lithography apparatus and method for controlling lithography apparatus

Pattern forming method, processing method, and processing apparatus

Pattern forming method, mold and data processing method

Simulation model creating method, mask data creating method and semiconductor device manufacturing method

Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus

Method, apparatus, and computer readable medium for evaluating a sampling inspection

Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device

Measurement coordinate setting system and method

Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method

Testing system, a computer implemented testing method and a method for manufacturing electronic devices

Testing system, a computer implemented testing method and a method for manufacturing electronic devices

Evaluation of pattern formation process, photo masks for the evaluation, and fabrication method of a semiconductor device with the evaluation process

TOKYO SHIBAURA ELECTRIC CO

Surface-treating agent adapted for intermediate products of a semiconductor device

Surface-treating agent adapted for intermediate products of a semiconductor device

Method of etching a semiconductor substrate

FUJITSU LTD

Channel switching method and channel switching controller

Information processing apparatus and cooling method

TOSHIBA MEMORY CORP

Mold and mold manufacturing method

Method for designing mask set, recording medium, template, and method for manufacturing template

KABUSHIKI KAISAHA TOSHIBA

Dose monitoring method and manufacturing method of semiconductor device

KIOXIA CORP

Method for designing mask set, recording medium, template, and method for manufacturing template

ASANO MASAFUMI

Pattern forming method, processing method, and processing apparatus

TAKEKAWA YOKO

Mask pattern creation method, recording medium, and semiconductor device manufacturing method