Inventor · disambiguated record
Robert P. Akins
Also filed as: AKINS ROBERT P
13 granted patents·2 pending applications·933 citations·filing 1988–2010
94Inventor score
Top patents by PatentIndex Score
15 records- 0198US4959840ACompact excimer laser including an electrode mounted in insulating relationship to wall of the laserCYMER LASER TECH·Filed 1988·Granted Sep 25, 1990·259 cites·21 claims
- 0297US5359620AApparatus for, and method of, maintaining a clean window in a laserCYMER LASER TECH·Filed 1992·Granted Oct 25, 1994·189 cites·32 claims
- 0397US5023884ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jun 11, 1991·204 cites·15 claims
- 0496US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 0594US7361918B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Apr 22, 2008·35 cites·6 claims
- 0682US7317179B2Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrateCYMER INC·Filed 2005·Granted Jan 8, 2008·11 cites·22 claims
- 0779US5048041ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Sep 10, 1991·40 cites·5 claims
- 0878US8295316B2Method and system for managing light source operationAKINS ROBERT P·Filed 2010·Granted Oct 23, 2012·5 cites·11 claims
- 0963US5029177ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jul 2, 1991·21 cites·4 claims
- 1060US5018162ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted May 21, 1991·19 cites·6 claims
- 1155US5018161ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted May 21, 1991·16 cites·5 claims
- 1253US5027366ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jun 25, 1991·15 cites·10 claims
- 1345US5033055ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jul 16, 1991·10 cites·6 claims
- 1438US2009250637A1System and methods for filtering out-of-band radiation in EUV exposure toolsCYMER INC·Filed 2009·Application pending·0 cites
- 1534US2007088794A1Web-based method for information servicesCYMER INC·Filed 2005·Application pending·0 cites
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