Inventor · disambiguated record
Ikuo Sunaka
Also filed as: SUNAKA IKUO
9 granted patents·14 citations·filing 2011–2023
81Inventor score
Top patents by PatentIndex Score
9 records- 0182US11869777B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 9, 2024·1 cites·16 claims
- 0276US9627238B2Substrate transfer apparatus, substrate transfer method, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Apr 18, 2017·4 cites·3 claims
- 0374US9696262B2Substrate processing apparatus, method of operating substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Jul 4, 2017·3 cites·16 claims
- 0471US12362202B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 15, 2025·0 cites·5 claims
- 0565US10067514B2Substrate processing apparatus and liquid mixing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 4, 2018·4 cites·9 claims
- 0660US8707893B2Substrate treatment system, substrate treatment method, and non-transitory computer storage mediumDEGUCHI MASATOSHI·Filed 2011·Granted Apr 29, 2014·2 cites·18 claims
- 0747US10128138B2Substrate transfer method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Nov 13, 2018·0 cites·5 claims
- 0844US9773690B2Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport containerTOKYO ELECTRON LTD·Filed 2013·Granted Sep 26, 2017·0 cites·13 claims
- 0937US11094568B2Processing apparatus, abnormality detection method, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 17, 2021·0 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →