Inventor
CHEN NUNO YEN-CHU
SG7 patents
Patents
7 patentsUSD1007449SDec 12, 2023
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC6 citations83
US10991617B2Apr 27, 2021
Methods and apparatus for cleaving of semiconductor substrates
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US11610807B2Mar 21, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11569122B2Jan 31, 2023
Methods and apparatus for cleaving of semiconductor substrates
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US11929260B2Mar 12, 2024
Low warpage curing methodology by inducing curvature
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US12048948B2Jul 30, 2024
Methods for forming microwave tunable composited thin-film dielectric layer
APPLIED MATERIALS INC0 citations50
US11375584B2Jun 28, 2022
Methods and apparatus for processing a substrate using microwave energy
APPLIED MATERIALS INC0 citations49