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Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: May 7, 2021Filed: May 7, 2021Granted: Dec 12, 2023
Est. expiryMay 7, 2041(~14.8 yrs left)· nominal 20-yr term from priority
Inventors:David GuntherKirankumar Neelasandra SavandaiahJiao SongMadan Kumar Shimoga MylarappaYue CuiNuno Yen-Chu ChenMengxue Wu
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6
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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