Inventor
LEE BYOUNG-TAEK
KR12 patents
Patents
12 patentsUS5780115AJul 14, 1998
Methods for fabricating electrode structures including oxygen and nitrogen plasma treatments
SAMSUNG ELECTRONICS CO LTD68 citations96
US6239461B1May 29, 2001
Semiconductor device capacitor having a recessed contact plug
SAMSUNG ELECTRONICS CO LTD47 citations95
US5940705AAug 17, 1999
Methods of forming floating-gate FFRAM devices
SAMSUNG ELECTRONICS CO LTD55 citations95
US6699625B2Mar 2, 2004
Reflection photomasks including buffer layer comprising group VIII metal, and methods of fabricating and using the same
SAMSUNG ELECTRONICS CO LTD27 citations92
US6599806B2Jul 29, 2003
Method for manufacturing a capacitor of a semiconductor device
SAMSUNG ELECTRONICS CO LTD32 citations92
US6284589B1Sep 4, 2001
Method of fabricating concave capacitor including adhesion spacer
SAMSUNG ELECTRONICS CO LTD30 citations92
US6261849B1Jul 17, 2001
Method of forming integrated circuit capacitors having recessed oxidation barrier spacers and method of forming same
SAMSUNG ELECTRONICS CO LTD33 citations92
US6090704AJul 18, 2000
Method for fabricating a high dielectric capacitor
SAMSUNG ELECTRONICS CO LTD27 citations92
US6084765AJul 4, 2000
Integrated circuit capacitors having recessed oxidation barrier spacers
SAMSUNG ELECTRONICS CO LTD16 citations92
US6998200B2Feb 14, 2006
Reflection photomasks with a capping layer and methods for manufacturing the same
SAMSUNG ELECTRONICS CO LTD16 citations83
US6180970B1Jan 30, 2001
Microelectronic devices including ferroelectric capacitors with lower electrodes extending into contact holes
SAMSUNG ELECTRONICS CO LTD18 citations83
US6828190B2Dec 7, 2004
Method for manufacturing capacitor of semiconductor device having dielectric layer of high dielectric constant
SAMSUNG ELECTRONICS CO LTD4 citations62