Inventor · disambiguated record
Rosario Mollica
Also filed as: MOLLICA ROSARIO
8 granted patents·2 pending applications·77 citations·filing 2001–2020
86Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT5ENTEGRIS INC2AXCELIS TECH INC1OLSON JOSEPH C1XIA YANAN ANNIE1
Top patents by PatentIndex Score
10 records- 0189US11646175B2Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose controlAXCELIS TECH INC·Filed 2020·Granted May 9, 2023·4 cites·19 claims
- 0289US7394073B2Methods and apparatus for ion beam angle measurement in two dimensionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jul 1, 2008·25 cites·16 claims
- 0378US7202483B2Methods and apparatus for ion beam angle measurement in two dimensionsOLSON JOSEPH C·Filed 2005·Granted Apr 10, 2007·6 cites·27 claims
- 0478US6710359B2Methods and apparatus for scanned beam uniformity adjustment in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Mar 23, 2004·14 cites·16 claims
- 0570US7547460B2Ion implanter optimizer scan waveform retention and recoveryVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jun 16, 2009·10 cites·16 claims
- 0670US7442944B2Ion beam implant current, spot width and position tuningVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Oct 28, 2008·9 cites·25 claims
- 0764US7189980B2Methods and systems for optimizing ion implantation uniformity controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2003·Granted Mar 13, 2007·6 cites·17 claims
- 0855US8844909B2Gasification systems and methods for making bubble free solutions of gas in liquidXIA YANAN ANNIE·Filed 2009·Granted Sep 30, 2014·3 cites·11 claims
- 0947US2014357734A1Gasification systems and methods for making bubble free solutions of gas in liquidENTEGRIS INC·Filed 2014·Application pending·0 cites
- 1042US2008185044A1System and method of chemical dilution and dispenseENTEGRIS INC·Filed 2008·Application pending·0 cites
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