Inventor
IWAKURA HIROYUKI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “IWAKURA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
7 patentsUS10860005B2Dec 8, 2020
Substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations71
US9400794B2Jul 26, 2016
Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations62
US7813828B2Oct 12, 2010
Substrate processing system and group management system
HITACHI INT ELECTRIC INC3 citations62
US11086304B2Aug 10, 2021
Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis
HITACHI INT ELECTRIC INC0 citations50
US8719230B2May 6, 2014
Information managing method, information searching method and data displaying method
HITACHI INT ELECTRIC INC0 citations50
US10452856B2Oct 22, 2019
Processing apparatus, controller and processing system
HITACHI INT ELECTRIC INC0 citations46
US9720407B2Aug 1, 2017
Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations39
KOKUSAI ELECTRIC CORP
4 patentsUS10937676B2Mar 2, 2021
Substrate processing apparatus and device management controller
KOKUSAI ELECTRIC CORP4 citations71
US11966210B2Apr 23, 2024
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11782425B2Oct 10, 2023
Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11237538B2Feb 1, 2022
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
ASAI KAZUHIDE
3 patentsUS8329479B2Dec 11, 2012
Information managing method, information managing apparatus and substrate processing system
ASAI KAZUHIDE2 citations60
US8538571B2Sep 17, 2013
Substrate processing system, group managing apparatus, and method of analyzing abnormal state
ASAI KAZUHIDE1 citations51
US8447424B2May 21, 2013
Substrate processing system and group management system
ASAI KAZUHIDE1 citations50